加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業
加拿大Ldetek色譜儀MultiDetek2高純氣體分析色譜儀適用于高純氫、氧、氬、氮、氦、氖、氪、氙、二氧化碳等氣體中痕量雜質的檢測，儀器配備高靈敏度的氦離子化（PDHID）檢測器，采用中心切割與反吹技術，配置具有吹掃保護氣路的進樣切換閥和進口氦氣純化器，通過無死體積取樣或在線進樣方式，一次性完成上述高純氣體中H2、O2（Ar）、N2、CH4、CO、CO2等常見雜質或C1-C4等碳氫化合物的檢測，檢測限達ppb級，重復性RSD≤1％。
B2H6乙硼烷是一種無機化合物，是目前能分離出的*簡單的硼烷，化學式為B2H6，常溫下為無色氣體，用作火箭和導彈的高能燃料，也用于有機合成。
主要用作高純度硼單晶及十硼氫的原料，也用作半導體工業的摻雜源。可用作火箭和導彈的高能燃料，也可用于半導體生產，硅和鍺的外延生長、鈍化、擴散和離子注入。用于制藥、金屬焊接和有機合成等領域。加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業
主要用作高純度硼單晶及十硼氫的原料，也用作半導體工業的摻雜源。可用作火箭和導彈的高能燃料，也可用于半導體生產，硅和鍺的外延生長、鈍化、擴散和離子注入。用于制藥、金屬焊接和有機合成等領域。
乙硼烷（B2H6）的半導體行業要求測量低至亞ppb的痕量雜質。這種非常活潑的氣體在電子和光伏工業中用作半導體摻雜劑。
LDETEK整體解決方案加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業
MultiDetek2氣相色譜儀配置有一個通道用于輕雜質，另一個通道用于重組分雜質測量。兩個通道均采用帶氦的PED作為載體氣源。
The MultiDetek2 gas chromatograph is configured with one channel for the light impurities and another channel for the heavier impurities to measure. Both channels used a PED with Helium as carrier gas source.
在這里使用反應強的樣品氣體乙硼烷，眾所周知它也會產生弱酸，安裝在每個通道中的分離柱和探測器被安裝在反沖排氣配置的預柱單獨保護。保護柱和反沖/注入隔膜閥采用Hastelloy結構，以與樣品氣體的侵襲性兼容。
Working here with the very reactive sample gas B2H6, which is also well known to generate weak acids, the separation columns and the detectors mounted in each channel are individually protected with a pre-column mounted in a backflush to vent configuration. The protection columns and the backflush/injection diaphragm valves are constructed with Hastelloy to be compatible with the aggressivity of the sample gas.
除此之外，MultiDetek2還配備了一個集成流選擇器系統，該系統也采用Hastelloy材料制造。選擇器系統允許從B2H6流切換至量程氣，以進行校準/驗證。在氣流選擇器系統中增加了一個額外的入口，以便在每次分析之間將樣品氣體切換為惰性氣體（在這種情況下為氦氣）。此功能用于保護注射閥和取樣回路免受樣氣的侵蝕。通過這種配置，我們避免了流道的腐蝕和退化。加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業
On top of that, the MultiDetek2 is equipped with an integrated stream selector system also constructed with Hastelloy material. The stream selector system allows to switch from stream B2H6 along to Span gas for calibration/validation purpose. An extra inlet has been added to the stream selector system to switch the sample gas between each analysis to an inert gas being helium in this case. This feature is used to protect the injection valves and sampling loops from the aggressivity of the sample gas. By this type of configuration, we keep the corrosion and degradation of the flow path away.
研究結果
色譜圖：微量H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11中的雜質二硼烷（B2H6）
Chromatogram: Trace H2-CO2-B4H10-Ar-N2-CH4- B5H9-CO-B5H11 impurities in Diborane (B2H6)
檢測限 （基于空白噪聲級的3倍）
Limit of detection (based on 3 times the noise level from a blank)
結論
使用一個單元MultiDetek2 GC內的PlasmaDetek2檢測器，可以對二硼烷（B2H6）中的痕量ppb/ppm雜質H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11雜質進行分析。分析時間少于15分鐘。該裝置配置有Hastelloy和涂層不銹鋼閥門/配件/柱和管道的組合，以與樣氣的腐蝕性和酸性兼容。使用合適的材料，該系統堅固可靠，可**運行多年。該裝置對每種雜質使用4-20mA輸出，并使用Modbus協議進行數據傳輸。我們的LDGSS流選擇器系統也被用于允許在不同的流之間切換。LDGSS還配置了Hastelloy材料，以與樣氣的腐蝕性兼容。加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業
Using the PlasmaDetek2 detector inside one-unit MultiDetek2 GC, the analysis of trace ppb/ppm impurities H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11 impurities in Diborane (B2H6) can be performed. The analysis time is less than 15 minutes. The unit was configured with a combination of Hastelloy and coated stainless steel valves/fittings/columns and tubing to be compatible with the aggressive and acid nature of the sample gas.Using the proper material,the system is robust and safe to operate for years.The unit uses 4-20mA outputs for each impurity and also the Modbus protocol for data transmission. Our LDGSS stream selector system has been used as well to allow switching across the different streams. The LDGSS also has been configured with Hastelloy material to be compatible with the aggressivity of the sample gas.
更多加拿大Ldetek色譜儀MultiDetek2超高純氣體B2H6中微量雜質分析用于半導體行業信息請直接致電埃登威上海021-55581219
